Automation Systems for Wafer Inspection

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Welcome to Ludl Electronic Products

Ludl Electronic Products designs and manufactures precision components for wafer handling and positioning. Extending unique designs and philosophies, LEP has developed some of the most flexible and practical systems. Utilizing the unique approach of offering systems at every level of complexity and integration, an LEP system can be a turn-key inspection station or a sub-system that can be used with other instrumentation. LEP also offers individual components for more custom and proprietary applications. The principle components of an inspection system include the wafer handling robot and XY positioning stages. Additional components for macro inspection and wafer alignment are typically included depending upon the system requirements.

With shrinking die size and increasing demands from stringent quality assurance protocols, reliable and accurate XY positioning is critical. LEP stages are well known for exceptionally high performance with an unusually compact envelope. High resolution encoders and reliable drive technology are used to ensure reliable, accurate performance.

Contact us at 914-769-6111

  • Low Profile Stages
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    Low Profile Stages

    To meet the ever increasing demands of the semiconductor industry, LEP has a full line of high accuracy, high performance stages. Designed to eliminate compromise, these stages offer the best performance available in a low profile microscope stage.

  • Edge Gripper / Inspection Module
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    Edge Gripper / Inspection Module

    The Ludl Electronic Products Edge Gripper module provides precision wafer handling and alignment for wafers with exclusion requirements. The Edge Gripper module has strictly edge only contact to perform inspection, alignment and wafer flipping operations.

  • Wafer Handling Robots
  • Focus Control
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    Focus Control

    Focus control is a key component for microscope automation. Almost any microscope automation application can benefit from control of the focus. Of course not all requirements for motorized focus are the same. LEP offers different options and technologies to suit the application.

  • Inspection/Measurement Systems
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    Inspection/Measurement Systems

    Ludl Electronic Products designs and manufactures precision components for wafer handling and positioning. Extending unique designs and philosophies, LEP has developed some of the most flexible and practical systems.