200mm and 300mm Stages
The demands of 300mm microelectronic technology requires a stage that has both extended travel range in addition to the highest positioning performance. The LEP 12”x12” stage is designed to meet or exceed those requirements.
The stable design employs over sized stainless steel crossed roller bearing guide ways. Heavy components assure the long-term stability. Without compromise, this stage minimizes its three dimensional envelope with clever design and strict manufacturing processes.
The stage is available with either stepper motors or DC servo motors. Coupled with precision ballscrews, performance is maintained at all speeds. Maintenance is minimal. Standard on all stages are high resolution rotary encoders which provide position feedback.
The optional XY grid encoder adds increased performance for the most demanding applications. With 0.4 micron repeatability and very high accuracies these stages are very well suited for microscope applications such as defect review and bit mapping.