Ludl Electronic Products designs and manufactures precision components for wafer handling and positioning. Extending unique designs and philosophies, LEP has developed some of the most flexible and practical systems. Utilizing the unique approach of offering systems at every level of complexity and integration, an LEP system can be a turn-key inspection station or a sub-system that can be used with other instrumentation. LEP also offers individual components for more custom and proprietary applications. The principle components of an inspection system include the wafer handling and XY positioning stages. Additional components for macro inspection and wafer alignment are typically included depending upon the system requirements. With shrinking die size and increasing demands from stringent quality assurance protocols, reliable and accurate XY positioning is critical. LEP stages are well known for exceptionally high performance with an unusually compact envelope. High resolution encoders and reliable drive technology are used to ensure reliable, accurate performance.
Ludl Electronic Products developed a software package to control the robot and stage for the wafer handling system. This software runs on a PC and uses a small touchscreen to allow easy user interaction while using the microscope.